Slip model for the ultra-thin gas-lubricated slider bearings of an electrostatic micromotor in MEMS

Microsystem Technologies

Volumn 15, Issue 6, 2009, Pages 953-961

  Zhang, Wen Ming ^a   Meng, Guang ^a   Zhou, Jian Bin ^a   Chen, Jie Yu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL SOLUTIONS; FIRST-ORDER; HARD SPHERES; LINEARIZED BOLTZMANN EQUATION; LOAD CARRYING CAPACITIES; MEMSDEVICES; MICRO-MOTORS; MICROELECTROMECHANICAL SYSTEMS; MICROMOTOR; MODIFIED REYNOLDS EQUATION; SECOND-ORDER SLIP; SLIDER BEARINGS; SLIP EFFECTS; SLIP MODEL; SOFT SPHERES; STREAMWISE LOCATIONS; ULTRA-THIN;

BEARINGS (MACHINE PARTS); BEARINGS (STRUCTURAL); BOLTZMANN EQUATION; CAPILLARY FLOW; COMPOSITE MICROMECHANICS; ELECTROSTATICS; LOAD LIMITS; LUBRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MOLECULAR DYNAMICS; PRESSURE DISTRIBUTION; PRESSURE EFFECTS; SPECTRUM ANALYZERS; STEPPING MOTORS; VIBRATIONS (MECHANICAL);

GAS LUBRICATED BEARINGS;

EID: 67349227350     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0828-z     Document Type: Article

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