Dynamic characteristics of micro air bearings for microsystems

Microsystem Technologies

Volumn 14, Issue 2, 2008, Pages 229-234

  Zhang, Q D ^a   Shan, X C ^b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BEARING CAPACITY; FITS AND TOLERANCES; MICROFABRICATION; MICROSYSTEMS; MOTION CONTROL;

ECCENTRICITY RATIO; MICRO AIR BEARINGS; RADIAL CLEARANCE; SHOCK TOLERANCE;

JOURNAL BEARINGS;

EID: 35148895414     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0414-1     Document Type: Article

References (6)

1. Constantinscu VN, Galetuse G (1987) Stability criterion for spiral-grooved thrust gas bearing. ASME Trans J Tribology 109:183-188
2. Constantinscu VN, Galetuse G (1990) On the dynamic stability of the spiral-grooved gas-lubricated thrust bearing. ASME Trans J Tribology 112:734-737
3. Hamrock J (1994) Fundamentals of fluid lubrication. McGraw-Hill, New York
4. Piekos ES (2000) Numerical simulation of gas-lubricated journal bearings for microfabricated machines. Doctoral thesis, MIT, Cambridge, MA, USA
5. Savoulides S, Breuer KS, Jacobson S, Ehrich F (2001) Low-order models for very short hybrid gas bearings. ASME Trans J Tribology 123:368-375
6. Zhang QD, Guo GX, Bi C (2005) Air bearing spindle motor for hard disk drives. STLE Tribology Trans 48:468-473