Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

CIRP Annals - Manufacturing Technology

Volumn 58, Issue 1, 2009, Pages 367-370

  Aoyama, T ^a   Koizumi, K ^a   Kakinuma, Y ^a   Kobayashi, Y ^b  

^a KEIO UNIVERSITY   (Japan)

^b NIKON CORPORATION   (Japan)

Author keywords

Bearing; Design; Vibration

Indexed keywords

BEARING; EXPERIMENTAL ANALYSIS; HIGH DENSITIES; MICRO VIBRATIONS; NEW DESIGNS; PRECISION MACHINES; TRANSIENT STATE; VIBRATION;

BEARINGS (STRUCTURAL); GUIDEWAYS; MACHINE DESIGN; PRECISION ENGINEERING;

AERODYNAMICS;

EID: 67349213269     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2009.03.107     Document Type: Article

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