Improvement of machining accuracy of 5-axis control ultraprecision machiningn by means of laminarization and mirror surface finishing

CIRP Annals - Manufacturing Technology

Volumn 54, Issue 1, 2005, Pages 329-332

  Kawai, T ^a   Ebihara, K ^a   Takeuchi, Y ^b  

^a Tokyo Institute of Technology   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Accuracy; Micromachining; Ultraprecision

Indexed keywords

COMPRESSED AIR; FINISHING; MICROMACHINING; PIPING SYSTEMS; REYNOLDS NUMBER; TURBULENT FLOW; VISCOSITY;

ACCURACY; LAMINARIZATION; MIRROR SURFACE FINISHING; ULTRAPRECISION;

MACHINING;

EID: 21944448635     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60115-2     Document Type: Article

References (7)

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6. Sawada, K., Kawai, T., Ebihara, K., Takeuchi, Y., 2003, Improvement of Air Bearing Performance by Means of Laminarization and its Application to Ultraprecision Micromachining, Proc. of the EUSPEN Int. Topical Conf., Aachen, 61-64.
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