Numerical and experimental analysis for the small vibration of aerostatic guideways

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 1, 2006, Pages 419-422

  Aoyama, T ^a   Kakinuma, Y ^a   Kobayashi, Y ^b  

^a KEIO UNIVERSITY   (Japan)

^b NIKON CORPORATION   (Japan)

Author keywords

Bearing; Design; Vibration

Indexed keywords

BEARINGS (MACHINE PARTS); MACHINE DESIGN; MACHINING; NUMERICAL ANALYSIS; VIBRATIONS (MECHANICAL);

AEROSTATIC GUIDEWAYS; ORIFICE RESTRICTORS; ULTRAPRECISION DEVICES;

AERODYNAMICS;

EID: 33750045211     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60449-1     Document Type: Article

References (3)

1. Shinno, H., Hashizume, H., Yoshioka, H., Komatsu, K., Shinshi, T., Sato, K., 2004, X-Y-e-Positioning Table System for a Motor Machine, Annals of the CIRP, 53/1:337-340.
2. Kawai, T., Ebihara, K., Takeuchi, Y., 2005, Improvement of Machining Accuracy of 5-Axis Control Ultraprecision Machining by Means of Laminarization and Mirror Surface Finishing, Annals of the CIRP, 54/1 :329-332.
3. Sawada, K., Kawai, T., Ebihara, K., Takeuchi, Y., 2003, Improvement of Air Bearing Performance by Means of Laminarization and its Application to Ultraprecision Micromachining, Proc. of the Euspen Topical Conference., Aachen :61-64.