Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 41, Issue 6, 2009, Pages 994-997

  Delachat, F ^a   Carrada, M ^a   Ferblantier, G ^a   Slaoui, A ^a   Bonafos, C ^b   Schamm, S ^b   Rinnert, H ^c  

^a Faculté de Médecine   (France)

^b CEMES CNRS   (France)

^c UNIVERSITÉ DE LORRAINE   (France)

Author keywords

EF TEM; Photoluminescence; Si ncs; Silicon nitride; Superlattices

Indexed keywords

CONVENTIONAL TEM; ECR-PECVD; EF-TEM; ELECTRON CYCLOTRON RESONANCE PLASMAS; GAS-FLOW RATIOS; MATRIXES; MULTI-LAYER STRUCTURES; ROOM TEMPERATURES; SI ATOMS; SI CLUSTERS; SI NANOCRYSTALS; SI-NCS; SPATIAL CONFINEMENTS; STRUCTURAL AND OPTICAL PROPERTIES; STRUCTURAL CHARACTERISTICS; THERMAL-ANNEALING; VISIBLE RANGES;

ATOMS; CELL MEMBRANES; CYCLOTRONS; ELECTRON CYCLOTRON RESONANCE; GAS PERMEABLE MEMBRANES; MULTILAYERS; NANOCRYSTALS; OPTICAL PROPERTIES; OPTOELECTRONIC DEVICES; PHASE SEPARATION; PHOTOLUMINESCENCE; PHOTOVOLTAIC CELLS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON NITRIDE; SILICON OXIDES; SOLAR CELLS;

SILICON WAFERS;

EID: 67349194049     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2008.08.006     Document Type: Article

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