Fabrication of large-area nickel nanobump arrays

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 871-873

  Chen, X ^a   Wei, X ^a   Jiang, K ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Monolayer self assembly; Nanobowl structure; Nickel nanobump

Indexed keywords

BIO-CHEMICAL SENSORS; CONDUCTIVE LAYERS; FABRICATION TECHNIQUES; HIGH THROUGHPUTS; INTERNAL SURFACES; LOW COSTS; METALS AND ALLOYS; NANO-PATTERNS; NANOBOWL ARRAYS; NANOBOWL STRUCTURE; NANOBUMP ARRAYS; NANOBUMPS; POLYDIMETHYLSILOXANE PDMS;

ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; FABRICATION; METALLURGY; MICROCHANNELS; MOLDS; NICKEL ALLOYS; OPTICAL INSTRUMENTS; OPTICAL SENSORS; POLYSTYRENES; SELF ASSEMBLY; SILICONES;

NICKEL;

EID: 67349192260     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.060     Document Type: Article

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