CMOS compatible cost-efficient fabrication of SOI grating couplers

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1114-1116

  Bolten, Jens ^a   Hofrichter, Jens ^b   Moll, Nikolaj ^b   Schönenberger, Sophie ^b   Horst, Folkert ^b   Offrein, Bert J ^b   Wahlbrink, Thorsten ^a   Mollenhauer, Thomas ^a   Kurz, Heinrich ^a  

^a AMO GMBH   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Electron beam lithography; Fibre to chip coupling; Grating couplers; HSQ; Silicon photonics

Indexed keywords

1550 NM; 3 DB BANDWIDTHS; AUTOMATED MEASUREMENTS; CMOS-COMPATIBLE; COST-EFFICIENT; COUPLING EFFICIENCIES; FIBRE-TO-CHIP COUPLING; GRATING COUPLERS; HSQ; SILICON PHOTONICS; TELECOM WAVELENGTHS; TEST DEVICES; TM POLARIZATIONS;

ELECTRON BEAMS; FABRICATION; PHOTONIC DEVICES;

ELECTRON BEAM LITHOGRAPHY;

EID: 67349181271     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.038     Document Type: Article

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