Fabrication and validation of fused silica NIL templates incorporating different length scale features

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 705-708

  Lalev, G ^a   Petkov, P ^a   Sykes, N ^a   Hirshy, H ^a   Velkova, V ^a   Dimov, S ^a   Barrow, D ^a  

^a CARDIFF UNIVERSITY   (United Kingdom)

Author keywords

3D machining; Focused Ion Beam (FIB); Laser ablation; Micromachining; Nano Imprint Lithography; Nanofabrication; Nanostructuring

Indexed keywords

3D MACHINING; COST EFFECTIVES; FOCUSED ION BEAM (FIB); LENGTH-SCALE; MESO-SCALE; MICRO-AND NANO-PATTERNING; MICRO-SCALE; MICRO-STRUCTURES; NANO-SCALE; NANOFABRICATION; NANOSTRUCTURING; OPTIMUM PROCESSING; SILICA TEMPLATES;

BOUNDARY LAYER FLOW; COMPOSITE MICROMECHANICS; COST EFFECTIVENESS; FOCUSED ION BEAMS; IONS; LASER ABLATION; LASER APPLICATIONS; LASERS; MICROMACHINING; NANOIMPRINT LITHOGRAPHY; PULSED LASER DEPOSITION; SILICA;

FUSED SILICA;

EID: 67349166178     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.074     Document Type: Article

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