Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1379-1381

  Yang, Rong ^a   Lu, Bing Rui ^a   Wan, Jing ^a   Xie, Shen Qi ^a   Chen, Yifang ^b   Huq, Ejaz ^b   Qu, Xin Ping ^a   Liu, Ran ^a  

^a ASIC and System   (China)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Bonding; Micro nano fluidics; Nanoimprint lithography; SU 8

Indexed keywords

BIO COMPATIBILITIES; BIOLOGICAL APPLICATIONS; BONDING PRESSURES; BONDING STRENGTHS; CHANNEL PROFILES; FABRICATION PROCESS; FABRICATION TECHNIQUES; FLUIDIC CHANNELS; FLUIDIC CONTROLS; MASS PRODUCTIONS; MICRO/NANO FLUIDICS; NANO-IMPRINT LITHOGRAPHIES; SU-8;

CELLULAR RADIO SYSTEMS; CHEMICAL STABILITY; FABRICATION; FLUIDIC DEVICES; FLUIDICS; OPTICAL PROPERTIES;

NANOIMPRINT LITHOGRAPHY;

EID: 67349163193     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.02.002     Document Type: Article

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