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Volumn 116, Issue 2-3, 2009, Pages 503-506
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Microstructure study of a nanocrystalline two-phase ZrNxOy thin film
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Author keywords
Nitrides; Oxides; Thin films
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Indexed keywords
AS-DEPOSITED FILMS;
BEAM ENERGIES;
COLUMNAR STRUCTURES;
COMPOSITIONAL DISTRIBUTION;
CRYSTALLOGRAPHIC ORIENTATIONS;
DARK-FIELD;
FILM PROPERTIES;
GROWTH PROCESS;
HOLLOW CATHODE DISCHARGE;
ION PLATING;
LATERAL DIFFUSION;
NANOCRYSTALLINE;
OXYGEN ATOM;
OXYNITRIDE;
PHASE FRACTIONS;
TEM;
FILM GROWTH;
MICROSTRUCTURE;
NANOCRYSTALLINE MATERIALS;
NITRIDES;
OXYGEN;
THIN FILM DEVICES;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
ZIRCONIUM;
ZIRCONIUM ALLOYS;
PHASE SEPARATION;
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EID: 67349149637
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matchemphys.2009.04.034 Document Type: Article |
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Times cited : (8)
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References (14)
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