Design and fabrication of an L-type waveguide megasonic system for cleaning of nano-scale patterns

Current Applied Physics

Volumn 9, Issue 2 SUPPL., 2009, Pages

  Kim, Hyunse ^a   Lee, Yanglae ^a   Lim, Euisu ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Megasonic; Nano pattern cleaning; Waveguide

Indexed keywords

ACOUSTIC PRESSURES; ANSYS FINITE ELEMENT METHOD; MAXIMUM VALUES; MEGASONIC; NANO PATTERN; NANO-PATTERN CLEANING; NANO-SCALE PATTERNS; PARTICLE REMOVAL EFFICIENCY; PATTERN DAMAGES; PEAK VALUES; QUARTZ WAVEGUIDE; STANDARD DEVIATION; TYPE SYSTEMS;

ACOUSTIC IMPEDANCE; OXIDE MINERALS; PIEZOELECTRIC ACTUATORS; QUARTZ; REMOVAL; SEMICONDUCTING INDIUM COMPOUNDS;

WAVEGUIDES;

EID: 67349148527     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2008.12.058     Document Type: Article

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