End-facet polishing of surface plasmon waveguides in lithium niobate

IEEE Transactions on Advanced Packaging

Volumn 31, Issue 3, 2008, Pages 479-483

  Jétte Charbonneau, Stéphanie ^a   Lahoud, Nancy ^b   Charbonneau, Robert ^a   Mattiussi, Greg ^c   Berini, Pierre ^d,e  

^a DEFENCE RESEARCH AND DEVELOPMENT CANADA   (Canada)

^b CHILDREN S HOSPITAL OF EASTERN ONTARIO   (Canada)

^c Epocal Inc   (Canada)

^d UNIVERSITY OF OTTAWA   (Canada)

^e Spectalis Corporation   (Canada)

Author keywords

Optical coupling; Optical interconnections; Optical planar waveguide components; Optical surface waves; Plasmons

Indexed keywords

BEFORE AND AFTER; CROSS SECTIONS; GOLD STRIPES; HETEROGENEOUS STRUCTURES; HIGH QUALITIES; LITHIUM NIOBATE; LONG-RANGE SURFACE PLASMONS; OPTICAL COUPLING; OPTICAL INSERTION LOSS; OPTICAL INTERCONNECTIONS; OPTICAL PLANAR WAVEGUIDE COMPONENTS; OPTICAL SURFACE WAVES; SCATTERING LOSS; SILICON SUBSTRATES; SURFACE PLASMON WAVEGUIDES;

DIES; FLUID DYNAMICS; INTEGRATED OPTOELECTRONICS; LITHIUM; NIOBIUM COMPOUNDS; OPTICAL DATA STORAGE; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PLANAR WAVEGUIDES; PLASMONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE WAVES; WAFER BONDING; WATER WAVES; WAVEGUIDE COMPONENTS;

POLISHING;

EID: 67349113960     PISSN: 15213323     EISSN: None     Source Type: Journal    
DOI: 10.1109/TADVP.2008.924236     Document Type: Article

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