Capacitance controlled n-GaN SAW UV sensor

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 984-987

  Chivukula, Venkata S ^a   Čiplys, Daumantas ^a,b   Shur, Michael S ^a   Rimeika, Romualdas ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b VILNIUS UNIVERSITY   (Lithuania)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE VARIATION; INTERDIGITAL TRANSDUCER; PHASE CHANGE; PHOTOCAPACITANCE; POWER DENSITIES; REFLECTION AND TRANSMISSION; S-PARAMETER MEASUREMENTS; SAMPLE SURFACE; SIGNAL PHASE; SPOT POSITION; UV ILLUMINATIONS; UV SENSOR;

ACOUSTIC SURFACE WAVE DEVICES; CAPACITANCE; GALLIUM ALLOYS; GALLIUM NITRIDE; LIGHT REFLECTION; SEMICONDUCTING GALLIUM; ULTRASONIC TRANSDUCERS; ULTRAVIOLET DEVICES;

SENSORS;

EID: 67149117235     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716607     Document Type: Conference Paper

References (15)

1. E. Monroy, F. Omnes, and F Calle, "Wide-bandgap semiconductor ultraviolet photodetector," vol.18, R33-R51, 2003.
2. Eva Monroy et al. "GaN-based solar-ultraviolet detection instrument," Applied Optics, Vol.32, No. 22, 1998.
3. F. Calle, J. Padros, T. Palacios, and J. Grajal, Nitride-based surface acoustic wave devices and applications, phys. stat. sol. (c), Vol.2, No. 3, pp. 976-983, 2005. (Pubitemid 41525154)
4. D. Ciplys, R. Rimeika, A. Sereika, R. Gaska, M.S. Shur, J. W. Yang, and M.A. Khan, "GaN-based SAW delay-line oscillator," Electronic Letters, Vol.37, No. 8, 2001.
5. D. Ciplys, R. Rimeika, A. Sereika, M.S. Shur, S. Rumyantsev, "Visible-blind photoresponse of GaN-based surface acoustic wave oscillator," Applied Physics Letters, Vol.80, No. 11, 2002.
6. D. Ciplys, R. Rimeika, M.S. Shur, N. Pala, A. Sereika, R. Gaska, Q. Fareed, "Ultraviolet-sensitive AlGaN-based Surface Acoustic Wave Devices," IEEE SENSORS 2004, Vienna, Austria, Oct. 24-27, 2004.
7. 3," Semiconductor Science and Technology, Vol.20, No. 8, pp. L27-L30, 2005. (Pubitemid 41036992)
8. D. Ciplys, R. Rimeika, M.S. Shur, A. Sereika, R. Gaska, J. W. Yang, and M.A. Khan, "Radio frequency response of GaN-based SAW oscillator to UV illumination by the Sun and man-made source," Electronic Letters, Vol.38, No. 3, 2002. (Pubitemid 34167381)
9. D. Ciplys et al. "Deep-UV LED controlled AlGaN-based SAW oscillator," phys. stat. sol.(a),203, No. 7, 1834-1838, 2006. (Pubitemid 43875382)
10. Tzu Chieh Chen et al. "Suitability of Acoustic Wave Oscillators Fabricated Using Low Temperature-Grown AIN Films on GaN/Sapphire as UV sensors," IEEE Transansactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.55, No. 2, 2008. (Pubitemid 351162354) (Pubitemid 351356090)
11. K. Koh et al. "Surface Acoustic Wave Ultraviolet Sensor Using Epitaxial AlGaN/(Al, Ga)N Film," IEEE Ultrasonics Symposium, pp. 1774-1777, Oct 2-6, 2006.
12. Leo P. Schuler et al., "UV Sensing Using Surface Acoustic Wave Device on DC sputtered ZnO monolayer,"Microelectronics Engineering, Vol.83, No. 4, pp. 1403-1406, 2006.
13. H. M. Chung et al, "Long-term photocapacitance decay behavior in undoped GaN," Jap. J. Appl. Phys., Vol.40, Part 1, No. 10, pp. 5871- 5874, 2001. (Pubitemid 33128125)
14. W. Huang, T. Khan, and T. Paul Chow, "Comparison of MOS Capacitors on n- and p- Type GaN," Journal of Electronic Materials, Vol.35, No. 4, 2006. (Pubitemid 43745621)
15. Colin K. Campbell, "Surface Acoustic Wave Devices for Mobile and Wireless Communication," Academic Press, London, U.K (1998).