Scalable (24 - 140 Gbps) optical data link, well adapted for future maskless lithography applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7271, Issue , 2009, Pages

  Paraskevopoulos, A ^a   Voss, S H ^a   Talmi, M ^a   Walf, G ^a  

^a FRAUNHOFER HEINRICH HERTZ INSTITUTE   (Germany)

Author keywords

Data buffering, bicmos technology; Integrated optical receiver; Maskless lithography; Optical data link

Indexed keywords

BI-CMOS; DATA BUFFERING, BICMOS TECHNOLOGY; DATA LINK; DATA PROCESSORS; DATA VOLUME; FREE-SPACE TRANSMISSION; HIGH-SPEED DATA; INTEGRATED OPTICAL RECEIVER; IP CORE; LOW NOISE; MASKLESS LITHOGRAPHY; MICRON TECHNOLOGIES; OPTICAL DATA LINK; OPTICAL DATA LINKS; PARALLELIZATION;

ACOUSTIC RECEIVERS; COMPUTER ARCHITECTURE; ELECTRON BEAMS; LITHOGRAPHY; NETWORK ARCHITECTURE; OPTICAL RECEIVERS; TECHNOLOGY;

BICMOS TECHNOLOGY;

EID: 67149091230     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.811495     Document Type: Conference Paper

References (6)

1. Christof Klein et al., Projection maskless lithography (PML2) : proof-of-concept setup and first experimental results, invited paper #6921-93 at SPIE Advanced Lithography - Emerging Lithographic Technologies XI, San Jose, California, USA, 26-28 February 2008, Proc. SPIE 6921 (2008).
2. Sven-Hendrik Voss et al., High-speed data storage and processing for projection mask-less lithography systems, Microelectronic Engineering 83 (2006) 976-979
3. Sven-Hendrik Voss et al., FPGA based high-speed system solutions for innovative maskless lithography systems, Proc. SPIE, Vol.6283, 62832K (2006)
4. Alexander Nemecek et al., Integrated BiCMOSp-i-n Photodetectors With High Bandwidth and High Responsivity, IEEE Journal of Selected Topics in Quantum Electronics, Volume 12, Issue 6, Part 2, Nov.-Dec. 2006 Page(s):1469 - 1475
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