Optoacoustic technique for thickness measurement of submicron metal coatings

Laser Physics

Volumn 19, Issue 6, 2009, Pages 1350-1360

  Pelivanov, I M ^a   Kopylova, D S ^a   Podymova, N B ^a   Karabutov, A A ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BACKWARD MODES; DETECTION MODE; DIFFERENT THICKNESS; DIODE-PUMPED; EXPERIMENTAL DATA; FORWARD MODE; FREEFORMS; HEAT DIFFUSIONS; HEAT SOURCES; LASER ENERGIES; LASER INDUCED; LASER PULSE DURATION; LEAST SQUARES FITTING; METAL COATINGS; METAL FILM; ND : YAG LASERS; NONDESTRUCTIVE METHODS; OPTOACOUSTIC TECHNIQUES; ORGANIC LIQUID; QUARTZ SUBSTRATE; SCALAR POTENTIAL; SUBMICRON; THEORETICAL TREATMENTS; THERMAL FIELD; TRANSPARENT LIQUIDS; TRANSPARENT SUBSTRATE; ULTRASONIC PULSE; VIBRATION VELOCITY; WIDE-BAND;

ACETONE; CHROMATE COATINGS; CURVE FITTING; ETHANOL; LASER PULSES; LIQUIDS; METALLIC FILMS; METALS; OXIDE MINERALS; PHOTOLITHOGRAPHY; PIEZOELECTRIC TRANSDUCERS; PROTECTIVE COATINGS; PULSED LASER APPLICATIONS; PUMPING (LASER); QUARTZ; SUBSTRATES; THICKNESS GAGES; THICKNESS MEASUREMENT; ULTRASONIC TESTING; WAVE EQUATIONS;

NEODYMIUM LASERS;

EID: 67049099380     PISSN: 1054660X     EISSN: 15556611     Source Type: Journal    
DOI: 10.1134/S1054660X09060280     Document Type: Article

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