Remote quantitative temperature and thickness measurements of plasma-deposited titanium nitride thin coatings on steel using a laser interferometric thermoreflectance optical thermometer

Review of Scientific Instruments

Volumn 76, Issue 8, 2005, Pages 1-11

  Liu, Yue ^a   Mandelis, Andreas ^a   Choy, Mervyn ^a   Wang, Chinhua ^a   Segal, Lee ^b  

^a DEPARTMENT OF MECHANICAL AND INDUSTRIAL ENGINEERING   (Canada)

^b SPUTTEK Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; LASER APPLICATIONS; OPTICAL DEVICES; SEMICONDUCTOR DEVICES; SURFACE PROPERTIES; TITANIUM NITRIDE;

INTERFEROMETRIC THERMOREFLECTANCE; OPTICAL THERMOMETER; THERMO-OPTICAL PARAMETERS; TITANIUM NITRIDE (TIN) ALLOY;

THERMOMETERS;

EID: 26444614758     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2001673     Document Type: Article

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