Sensitivity improvement of a pump-probe set-up for thin film and microstructure metrology

Ultrasonics

Volumn 40, Issue 1-8, 2002, Pages 757-763

  Vollmann, Jacqueline ^a   Profunser, Dieter M ^a   Dual, Jürg ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Femtosecond laser acoustics; Laser based ultrasonics; MEMS inspection; Photoacoustics; Pump probe measurement; Thin film metrology

Indexed keywords

FREQUENCY MODULATION; LASER PULSES; LIGHT POLARIZATION; LIGHT REFLECTION; METALLIC FILMS; MICROSTRUCTURE; MULTILAYERS; PUMPING (LASER); SENSITIVITY ANALYSIS; THERMOELASTICITY; THIN FILMS;

CROSS-POLARIZATION;

ACOUSTOOPTICAL EFFECTS;

EID: 0036566302     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(02)00207-X     Document Type: Conference Paper

References (7)

1. Surface generation and detection of phonons by picosecond light pulses
2. Laser picosecond acoustics in thin films: Effects of elastic boundary conditions on pulse generation
3. Application of the picosecond ultrasonic technique to the study of elastic and time-resolved thermal properties of materials
4. Picosecond acoustics as a non-destructive tool for the characterization of very thin films
5. Optical generation and characterization of acoustic waves in thin films
6. Short-pulse laser heating on metals
7. Ultrasonic wave propagation in focusing tips with arbitrary geometries