Photoacoustic characterization of the mechanical properties of thin films

Applied Physics Letters

Volumn 80, Issue 4, 2002, Pages 691-693

  Hernandez, Carmen M ^a   Murray, Todd W ^a   Krishnaswamy, Sridhar ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLEXURAL MODES; GUIDED MODES; LASER ULTRASONICS; MICROCHIP LASERS; NARROW BANDS; NARROW-BAND ULTRASONIC; PERIODIC SOURCE; THIN FILM ALUMINUM; TWO LAYERS;

ACOUSTICS; MICHELSON INTERFEROMETERS; NITRIDES; PERIODIC STRUCTURES; PULSED LASERS; STRESSES; THIN FILMS;

MECHANICAL PROPERTIES;

EID: 79956059349     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1434303     Document Type: Article

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