Sol-gel fabrication of PZT thick films for MEMS

Integrated Ferroelectrics

Volumn 88, Issue 1, 2007, Pages 93-102

  Corkovic, S ^a   Whatmore, R W ^b   Zhang, Q ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Piezoelectric; PZT; Sol gel; Thick film

Indexed keywords

EID: 66949114975     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580601099025     Document Type: Conference Paper

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