Laser drilling of nano-pores in sandwiched thin glass membranes

Optics Express

Volumn 17, Issue 12, 2009, Pages 10044-10049

  Yu, Minrui ^a   Kim, Hyun Seok ^a   Blick, Robert H ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; PORE SIZE;

GLASS SLIDES; HIGH QUALITY; LASER DRILLING; LASER WAVELENGTH; PORE DIAMETERS; THIN GLASS; THIN LAYERS; ULTRA-SMALL;

BOROSILICATE GLASS;

GLASS; NANOPARTICLE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; EXCIMER LASER; MATERIALS; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; POROSITY; RADIATION EXPOSURE; ULTRASTRUCTURE;

GLASS; LASERS, EXCIMER; MANUFACTURED MATERIALS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; NANOPARTICLES; NANOTECHNOLOGY; POROSITY;

EID: 66849109255     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.010044     Document Type: Article

References (16)

1. J. Francey, "A new, low loss laser ablatable substrate for microwave applications," Microwave J, 47, 104-110 (2004).
2. M. Datta, T. Osaka, and J. Schultze, Microelectronic Packaging, Part III (CRC Press, 2004).
3. T. Kim, K. Campbell, A. Groisman, D. Kleinfeld, and C. Schaffer, "Femtosecond laser-drilled capillary integrated into a microfluidic device," Appl. Phys. Lett. 86(20), 201106 (2005).
4. Y. Iga, T. Ishizuka, W. Watanabe, K. Itoh, Y. Li, and J. Nishii, "Characterization of micro-channels fabricated by in-water ablation of femtosecond laser pulses," Jpn. J. Appl. Phys. 43(No. 7A), 4207-4211 (2004).
5. N. Fertig, A. Tilke, R. Blick, J. Kotthaus, J. Behrends, and G. Bruggencate, "Stable integration of isolated cell membrane patches in a nanomachined aperture," Appl. Phys. Lett. 77(8), 1218-1220 (2000).
6. N. Fertig, R. H. Blick, and J. C. Behrends, "Whole cell patch clamp recording performed on a planar glass chip," Biophys. J. 82(6), 3056-3062 (2002).
7. M. Mayer, J. K. Kriebel, M. T. Tosteson, and G. M. Whitesides, "Microfabricated teflon membranes for low-noise recordings of ion channels in planar lipid bilayers," Biophys. J. 85(4), 2684-2695 (2003).
8. G. Kopitkovas, T. Lippert, C. David, A. Wokaun, and J. Gobrecht, "Fabrication of micro-optical elements in quartz by laser induced backside wet etching," Microelectron. Eng. 67-68, 438-444 (2003).
9. C. R. Mendonca, L. R. Cerami, T. Shih, R. W. Tilghman, T. Baldacchini, and E. Mazur, "Femtosecond laser waveguide micromachining of PMMA films with azoaromatic chromophores," Opt. Express 16(1), 200-206 (2008).
10. W. F. Wonderlin, A. Finkel, and R. J. French, "Optimizing planar lipid bilayer single-channel recordings for high resolution with rapid voltage steps," Biophys. J. 58(2), 289-297 (1990).
11. E. Neher, and B. Sakmann, "Single-channel currents recorded from membrane of denervated frog muscle fibres," Nature 260(5554), 799-802 (1976).
12. W. Kingery, "Surface tension of some liquid oxides and their temperature coefficients," J. Am. Ceram. Soc. 42(1), 6-10 (1959).
13. S. Jeong, R. Greif, and R. Russo, "Shock wave and material vapour plume propagation during excimer laser ablation of aluminium samples," J. Phys. D Appl. Phys. 32(19), 2578-2585 (1999).
14. X. Zeng, X. Mao, S. Wen, R. Greif, and R. Russo, "Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities," J. Phys. D Appl. Phys. 37(7), 1132-1136 (2004).
15. N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, "Time-resolved shadowgraphs of material ejection in intense femtosecond laser ablation of aluminum," Phys. Rev. Lett. 99(16), 167602 (2007).
16. M. Thiyagarajan, "Experimental investigation of 193 nm excimer laser induced plasma in air," Ph.D. Thesis (University of Wisconsin-Madison, 2007).