Deformation behavior of silver submicrometer-pillars prepared by nanoimprinting

Philosophical Magazine

Volumn 89, Issue 10, 2009, Pages 869-884

  Buzzi, S ^a   Dietiker, M ^a   Kunze, K ^a   Spolenak, R ^a   Loffler, J F ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Direct nanoimprinting; Dislocation slip; EBSD; Mechanical properties; Microforming; Size effects; Yield strength

Indexed keywords

DIRECT NANOIMPRINTING; DISLOCATION SLIP; EBSD; MICROFORMING; SIZE EFFECTS; YIELD STRENGTH;

COMPRESSION TESTING; DEFORMATION; ELECTRON DIFFRACTION; FOCUSED ION BEAMS; MICROELECTRONICS; MILLING (MACHINING); YIELD STRESS;

MECHANICAL PROPERTIES;

EID: 66749190916     PISSN: 14786435     EISSN: 14786443     Source Type: Journal    
DOI: 10.1080/14786430902791748     Document Type: Article

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