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Volumn 94, Issue 21, 2009, Pages

Hot-electron characteristics in chemically resolved electrical measurements of thin silica and SiON layers

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT MEASUREMENTS; ELECTRICAL MEASUREMENT; GATE OXIDE; HOT-ELECTRON TRANSPORT; METALLIC PADS; POOLE-FRENKEL; STANDARD MEASUREMENTS; THICKNESS DEPENDENCE; THIN DIELECTRIC LAYER;

EID: 66549096617     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3141454     Document Type: Article
Times cited : (8)

References (20)
  • 10
    • 66549099447 scopus 로고    scopus 로고
    • 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors-RTP, Santa Barbara, CA, 4-7 October (unpublished).
    • J. L. Everaert, T. Conard, and M. Schaekers, 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors-RTP, Santa Barbara, CA, 4-7 October 2005 (unpublished).
    • (2005)
    • Everaert, J.L.1    Conard, T.2    Schaekers, M.3
  • 12
    • 0031995336 scopus 로고    scopus 로고
    • 0026-2714,. 10.1016/S0026-2714(97)00168-6
    • E. Cartier, Microelectron. Reliab. 0026-2714 38, 201 (1998). 10.1016/S0026-2714(97)00168-6
    • (1998) Microelectron. Reliab. , vol.38 , pp. 201
    • Cartier, E.1
  • 14
    • 4444265240 scopus 로고    scopus 로고
    • 0003-6951,. 10.1063/1.1782261
    • H. Cohen, Appl. Phys. Lett. 0003-6951 85, 1271 (2004). 10.1063/1.1782261
    • (2004) Appl. Phys. Lett. , vol.85 , pp. 1271
    • Cohen, H.1
  • 17
    • 66549089423 scopus 로고    scopus 로고
    • Residual hysteresis is observed in the low current regime, mainly associated with the wafer and back-contact impedance.
    • Residual hysteresis is observed in the low current regime, mainly associated with the wafer and back-contact impedance.
  • 19
    • 36149017207 scopus 로고
    • 0031-899X, ();, Phys. Rev. 103, 1648 (1956). 10.1103/PhysRev.103.1648
    • A. Rose, Phys. Rev. 0031-899X 97, 1538 (1955); M. A. Lampert, Phys. Rev. 103, 1648 (1956). 10.1103/PhysRev.103.1648
    • (1955) Phys. Rev. , vol.97 , pp. 1538
    • Rose, A.1    Lampert, M.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.