Spray deposited molybdenum doped indium oxide thin films with high near infrared transparency and carrier mobility

Applied Physics Letters

Volumn 94, Issue 21, 2009, Pages

  Parthiban, S ^a   Ramamurthi, K ^a   Elangovan, E ^b   Martins, R ^b   Fortunato, E ^b  

^a BHARATHIDASAN UNIVERSITY   (India)

^b Center of Excellence in Microelectronics Optoelectronics and Processes   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL TECHNIQUES; GLASS SUBSTRATES; IN-VACUUM; INDIUM OXIDE; MOLYBDENUM-DOPED INDIUM OXIDE THIN FILMS; NEAR INFRARED; NIR REGIONS; SPRAY-DEPOSITED; VISIBLE TRANSMITTANCE;

CARRIER CONCENTRATION; INDIUM; INFRARED DEVICES; MOLYBDENUM; OXIDE FILMS; SPRAY PYROLYSIS; THIN FILMS; TRANSPARENCY;

CARRIER MOBILITY;

EID: 66549084470     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3142424     Document Type: Article

References (23)

1. T. Koida and M. Kondo, Appl. Phys. Lett. 0003-6951 89, 082104 (2006). 10.1063/1.2337281
2. E. Fortunato, P. Barquinha, A. Pimentel, A. Goņalves, L. Pereira, and R. Martins, Adv. Mater. (Weinheim, Ger.) 0935-9648 17, 590 (2005). 10.1002/adma.200400368
3. J. A. Anna Selvan, A. E. Delahoy, S. Guo, and Y. Li, Sol. Energy Mater. Sol. Cells 0927-0248 90, 3371 (2006). 10.1016/j.solmat.2005.09.018
4. P. Drude, Ann. Phys. 0003-3804 308, 369 (1900). 10.1002/andp.19003081102
5. Y. Meng, X. Yang, H. Chen, J. Shen, Y. Jiang, Z. Zhang, and H. Hua, Thin Solid Films 0040-6090 394, 218 (2001). 10.1016/S0040-6090(01)01142-7
6. E. Elangovan, A. Marques, A. S. Viana, R. Martins, and E. Fortunato, Thin Solid Films 0040-6090 516, 1359 (2008). 10.1016/j.tsf.2007.03.155
7. P. Prathap, G. Gowri Devi, Y. P. V. Subbaiah, V. Ganesan, K. T. Ramakrishna Reddy, and J. Yi, Phys. Status Solidi A 0031-8965 205, 1947 (2008). 10.1002/pssa.200778859
8. D. J. Seo and S. H. Park, Physica B 0921-4526 357, 420 (2005).
9. S. Parthiban, V. Gokulakrishnan, K. Ramamurthi, E. Elangovan, R. Martins, E. Fortunato, and R. Ganesan, Sol. Energy Mater. Sol. Cells 0927-0248 93, 92 (2009). 10.1016/j.solmat.2008.08.007
10. E. Elangovan, K. Ramamurthi, and J. Optoelectron, Adv. Mater. (Weinheim, Ger.) 0935-9648 5, 45 (2003).
11. J. Joseph Prince, S. Ramamurthy, B. Subramanian, C. Sanjeevaraja, and M. Jayachandran, J. Cryst. Growth 0022-0248 240, 142 (2002). 10.1016/S0022-0248(01) 02161-3
12. H. L. Hartnagell, A. L. Dawar, A. K. Jain, and C. Jagadish, Semiconducting Transparent Thin Films (IOP, London, 1995), Vol. 77, p. 273.
13. N. Yamada, T. Tatejima, H. Ishizaki, and T. Nakada, Jpn. J. Appl. Phys., Part 2 0021-4922 45, L1179 (2006). 10.1143/JJAP.45.L1179
14. Powder Diffraction File, JCPDS-International Centre for Diffraction Data,ICDD, Philadelphia, Card No. 06-0416 (1997).
15. R. Martins, E. Fortunato, P. Nunes, I. Ferreira, A. Marques, M. Bender, N. Katsarakis, V. Cimalla, and G. Kiriakidis, J. Appl. Phys. 0021-8979 96, 1398 (2004). 10.1063/1.1765864
16. T. Koida and M. Kondo, J. Appl. Phys. 0021-8979 99, 123703 (2006). 10.1063/1.2203722
17. R. B. Dingle, Philos. Mag. 46, 831 (1955).
18. Y. Yoshida, D. M. Wood, T. A. Gessert, and T. J. Coutts, Appl. Phys. Lett. 0003-6951 84, 2097 (2004). 10.1063/1.1687984
19. R. T. Bate, R. D. Baxter, F. J. Reid, and A. C. Beer, J. Phys. Chem. Solids 0022-3697 26, 1205 (1965). 10.1016/0022-3697(65)90099-5
20. T. Pisarkiewicz, K. Zakrzewshka, and E. Leja, Thin Solid Films 0040-6090 174, 217 (1989). 10.1016/0040-6090(89)90892-4
21. Y. Ohhata, F. Shinoki, and S. Yoshida, Thin Solid Films 0040-6090 59, 255 (1979). 10.1016/0040-6090(79)90298-0
22. A. K. Kulkarni and S. A. Knickerbocker, J. Vac. Sci. Technol. A 0734-2101 14, 1709 (1996). 10.1116/1.580324
23. I. Hamberg and C. G. Granqvist, J. Appl. Phys. 0021-8979 60, R123 (1986). 10.1063/1.337534