Some studies on highly transparent wide band gap indium molybdenum oxide thin films rf sputtered at room temperature

Thin Solid Films

Volumn 516, Issue 7, 2008, Pages 1359-1364

  Elangovan, E ^a   Marques, A ^a   Viana, A S ^b   Martins, R ^a   Fortunato, E ^a  

^a Center of Excellence in Microelectronics Optoelectronics and Processes   (Portugal)

^b UNIVERSITY OF LISBON   (Portugal)

Author keywords

Indium molybdenum oxide; Room temperature; Sputtering; Structural properties; Transparent conducting oxides

Indexed keywords

ENERGY GAP; GLASS; HALL EFFECT; INDIUM COMPOUNDS; OPTICAL BAND GAPS; SPUTTERING;

CRYSTALLINE FILMS; INDIUM MOLYBDENUM OXIDE; ROOM TEMPERATURE; TRANSPARENT CONDUCTING OXIDES;

THIN FILMS;

EID: 38649096325     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.155     Document Type: Article

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