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Volumn 45, Issue 5, 2009, Pages 610-614
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Composition, microstructure and properties of C-N-Cr films deposited by pulsed bias arc ion plating
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Author keywords
Arc ion plating; C N Cr film; Microstructure; Property; Pulsed bias
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Indexed keywords
ADHESION STRENGTHS;
AMORPHOUS MATRICES;
ARC ION PLATING;
C-N-CR FILM;
CEMENTED CARBIDE SUBSTRATES;
CHEMICAL INERTNESS;
CR CONTENT;
CR FILM;
CRYSTALLINE PHASE;
DIAMOND-LIKE CARBON;
GROWTH PROCESS;
HARDNESS AND ELASTIC MODULUS;
HIGH HARDNESS;
INTERNAL STRESS;
LOW EXPANSION;
LOW FRICTION COEFFICIENTS;
MICROSTRUCTURE AND PROPERTIES;
NITROGEN CONTENT;
NITROGEN FLOW RATES;
PROPERTY;
PULSED BIAS;
PULSED BIAS ARC ION PLATINGS;
RAMAN SPECTRA;
SEM;
STRUCTURE AND PROPERTIES;
THERMAL STABILITY;
XPS;
AMORPHOUS CARBON;
AMORPHOUS FILMS;
BIOCOMPATIBILITY;
CARBIDES;
CAVITY RESONATORS;
CHEMICAL ANALYSIS;
CHROMIUM;
COMPOSITE FILMS;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
ELASTIC MODULI;
FILM GROWTH;
FLOW RATE;
FRICTION;
HARDNESS;
ION IMPLANTATION;
MICROSTRUCTURE;
NITROGEN;
PLATING;
SUBSTRATES;
TRANSITION METALS;
WEAR RESISTANCE;
CARBON FILMS;
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EID: 66349094599
PISSN: 04121961
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (7)
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