Electromagnetically actuated FR4 scanners

IEEE Photonics Technology Letters

Volumn 20, Issue 1, 2008, Pages 30-32

  Urey, Hakan ^a   Holmstrom, Sven ^a   Yalcinkaya, Arda D ^b  

^a KOÇ UNIVERSITY   (Turkey)

^b BOGAZICI UNIVERSITY   (Turkey)

Author keywords

Actuators; Fire resistant 4 (fr4); Optical microelectromechanical systems (mems); Scanners

Indexed keywords

COPPER LAYER; ELECTROMAGNETIC ACTUATION; FIRE RESISTANT; LOW FREQUENCY; MAGNETIC ACTUATION; MECHANICAL PLATFORM; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-MECHANICAL; OPTICAL MICROELECTROMECHANICAL SYSTEM; OPTICAL MICROELECTROMECHANICAL SYSTEMS (MEMS); PRINTED CIRCUIT BOARD TECHNOLOGY; RESONANT FREQUENCIES; SCAN ANGLE;

ACTUATORS; COMPOSITE MICROMECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PRINTED CIRCUIT BOARDS; PRINTED CIRCUIT MANUFACTURE;

SCANNING;

EID: 45149116728     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2007.911522     Document Type: Article

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