Development of multi-user multi-chip SOI CMOS-MEMS processes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 701-704

  Takahashi, K ^a   Mita, M ^b   Nakada, M ^a   Yamane, D ^a   Higo, A ^c   Fujita, H ^a   Toshiyoshi, H ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MICROMACHINED; CMOS DRIVER; CMOS-MEMS; ELECTRO-MECHANICAL; GRATING LIGHT VALVE; HIGH-VOLTAGE; MEMS DESIGN; MONOLITHICALLY INTEGRATED; MULTI-CHIP; MULTI-USER; SHIFTER CIRCUITS; SOI CMOS; TUNABLE GRATING;

ELECTROSTATIC ACTUATORS; MEMS; MONOLITHIC INTEGRATED CIRCUITS; VALVES (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 65949104077     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805479     Document Type: Conference Paper

References (8)

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