Modeling of a capacitive ∑-δ MEMS accelerometer system including the noise components and verification with test results

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 821-824

  Boǧa, Biter ^a,b   Ocak, Ilker Ender ^a   KPlah, Halük ^a   Akin, Tayfun ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^b SCIENTIFIC AND TECHNOLOGICAL RESEARCH COUNCIL OF TURKEY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-LOOP; DECIMATION FILTER; MEMS ACCELEROMETER; NOISE COMPONENTS; OPEN LOOPS; OPERATION RANGE; READOUT ELECTRONICS; SAMPLING RATES; SCALE FACTOR; SIGNAL PROCESSING UNIT; SIMULINK MODELS; TEST RESULTS;

DIGITAL SIGNAL PROCESSING; ELECTRIC FILTERS; IMAGE CODING; MEMS; MICROELECTROMECHANICAL DEVICES; READOUT SYSTEMS; SIGNAL PROCESSING;

ACCELEROMETERS;

EID: 65949098181     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805509     Document Type: Conference Paper

References (8)

1. M. A. Lemkin et al., "A Three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE JSSC, pp. 456-468, 1999
2. V. P. Petkov et al, "A fourth-order LA interface for micromachined inertial sensors," IEEE JSSC, vol. 40, pp. 1602-1609, 2005
3. N. Yazdi et al., "Micromachined inertial sensors," Proceedings of the IEEE, vol. 86, pp. 1640-1659, 1998
4. R. Kepenek et al., "A μg Resolution Micro Accelerometer System with A Second-Order ∑-Δ Readout Circuitry," Research in Microelectronics and Electronics PRIME 2008, pp. 41-44, 2008
5. H. Kulah et al., "Noise Analysis and Characterization of A LA Capacitive t-accelerometer," IEEE JSSC, vol. 41, pp. 352-361, 2006 (Pubitemid 43172552)
6. B. V. Amini and F. Ayazi, "Micro-gravity capacitive silicon-on-insulator accelerometers," JMM, vol. 15, pp. 2113-2120,2005
7. S. R. Norsworthy, R. Schreier, and G. C. Temes, Delta-Sigma Data Converters Theory, Design, and Simulation. IEEE Press, 1996
8. T. B. Gabrielson, "Mechanical-Thermal Noise in ptmachined Acoustic and Vibration Sensors," IEEE Transactions on Electron Devices, vol. 40, no.5, 1993