A low-Cost flexible hot-Film sensor system for flow sensing and its application to aircraf

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 527-530

  Zhu, R ^a   Liu, P ^a   Liu, X D ^a   Zhang, F X ^a   Zhou, Z Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT TECHNIQUES; EASY FABRICATION; FILM FLOWS; FLEXIBLE POLYIMIDE; FLOW SENSING; INTEGRATING SENSORS; LOW COSTS; MICRO AERIAL VEHICLE; MICROMACHINING PROCESS; NOVEL APPLICATIONS; PREPARATION METHOD; PROCESSING CIRCUITS; SENSOR SYSTEMS; SIMPLE STRUCTURES;

AEROSPACE VEHICLES; FEATURE EXTRACTION; FILM PREPARATION; MECHANICAL PROPERTIES; MICROMACHINING; POLYIMIDES; PRINTED CIRCUIT MANUFACTURE; SENSORS;

PRINTED CIRCUIT BOARDS;

EID: 65949092564     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805435     Document Type: Conference Paper

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