Non-spherical su-8 microlens array fabricated utilizing a novel stamping process and an electro-static pulling method

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 987-990

  Kuo, Shu Ming ^a   Lin, Che Hsin ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DOSAGE CONTROL; FABRICATION TECHNIQUE; GLASS SUBSTRATES; GLASS TRANSITION TEMPERATURE; MICRO-LENS ARRAYS; MICRONOZZLE; NON-SPHERICAL; NOVEL METHODS; OPTICAL QUALITIES; OPTICAL UNIFORMITY; PULLING METHOD; RADII OF CURVATURE; STAMPING PROCESS; SU-8 STRUCTURE; UNIFORM ELECTRIC FIELDS;

ELECTRIC FIELDS; FABRICATION; GLASS; GLASS TRANSITION; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; SPHERES; STAMPING; SURFACE ROUGHNESS;

PHOTORESISTS;

EID: 65949087241     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805551     Document Type: Conference Paper

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