Electrical, optical, and structural properties of InZnSnO electrode films grown by unbalanced radio frequency magnetron sputtering

Thin Solid Films

Volumn 517, Issue 18, 2009, Pages 5563-5568

  Park, Ho Kyun ^a   Jeong, Jin A ^a   Park, Yong Seok ^a   Kim, Han Ki ^a   Cho, Woon Jo ^b  

^a Kyung Hee University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Indium zinc tin oxide; Organic light emitting diodes; Radio frequency magnetron sputtering; Resistivity; Scanning electron microscopy; Transmission electron microscopy; Transparent conducting oxide; X ray diffraction

Indexed keywords

AMBIENT ENVIRONMENT; AMORPHOUS STRUCTURES; ANNEALING PROPERTIES; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRODE FILM; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; FIGURE OF MERIT; FILM STRUCTURE; GROWTH CONDITIONS; HIGH TRANSPARENCY; LOW RESISTIVITY; LOW SUBSTRATE TEMPERATURE; POST ANNEALING; RADIO-FREQUENCY MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING PROCESS; RESISTIVITY; RF-POWER; ROOM TEMPERATURE; SMOOTH SURFACE; TRANSPARENT CONDUCTING OXIDE; WORKING PRESSURES; ZINC TIN OXIDE;

DIFFRACTION; ELECTRIC RESISTANCE; ELECTRON MICROSCOPES; ELECTRONS; FIELD EMISSION; FILM GROWTH; HELMET MOUNTED DISPLAYS; INDIUM; LIGHT; LIGHT EMISSION; LIGHT EMITTING DIODES; LIGHT SOURCES; MAGNETRON SPUTTERING; MAGNETRONS; OPTICAL PROPERTIES; ORGANIC LIGHT EMITTING DIODES (OLED); OXIDE FILMS; RADIO BROADCASTING; RADIO TRANSMISSION; RADIO WAVES; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SCANNING; SCANNING ELECTRON MICROSCOPY; TIN; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC;

AMORPHOUS FILMS;

EID: 65649134779     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.02.138     Document Type: Article

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