Electron beam induced fabrication and characterization of nanostructures

Journal of Physics: Conference Series

Volumn 126, Issue , 2008, Pages

  Furuya, K ^a   Takeguchi, M ^a   Song, M ^a   Mitsuishi, K ^a   Tanaka, M ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 65649116535     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/126/1/012024     Document Type: Article

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