Electrohydrodynamic micropumps with asymmetric electrode geometries for microscale electronics cooling

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 16, Issue 2, 2009, Pages 483-488

  Kazemi, P ^a   Selvaganapathy, P ^a   Ching, Chan ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Electrode geometry; Electrohydrodynamics; Ion drag; Micropumps

Indexed keywords

AIR COOLING; ASYMMETRIC ELECTRODES; COOLING SOLUTIONS; EHD MICROPUMP; ELECTRODE DESIGNS; ELECTRODE GEOMETRY; ELECTRONICS COOLING; FLOWRATES; HEAT FLUX DENSITIES; HEAT REMOVAL CAPACITIES; HEAT TRANSFER FLUIDS; ION DRAG; LOW-POWER CONSUMPTION; LOWER-POWER CONSUMPTION; MICRO-FABRICATION TECHNIQUES; MICRO-SCALE; MICROPUMPS; MOVING PARTS; PRESSURE GENERATIONS; PRESSURE HEADS; SMALL FORM FACTORS; THERMAL MANAGEMENTS;

APPROXIMATION THEORY; COMPUTATIONAL GEOMETRY; COOLING; DRAG; ELECTRIC POWER UTILIZATION; ELECTROHYDRODYNAMICS; FLUID DYNAMICS;

PUMPS;

EID: 65349178173     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDEI.2009.4815182     Document Type: Article

References (8)

1. P. Dixit, N. Lin, J. Miao, W.K. Wong, and T.K. Choon, "Silicon nanopillars based 3D stacked microchannel heat sinks concept for enhanced heat dissipation applications in MEMS packaging", Sensors and Actuators A, Vol. 141, pp. 685-694, 2008.
2. X. Wei, Y. Joshi, and M.K. Patterson, "Experimental and numerical study of a stacked microchannel heat Sink for liquid cooling of microelectronic devices", J. Heat Transfer, Vol. 129, pp. 1432-1444, 2007.
3. L.J. Yang, J.M. Wang, and Y.L. Huang, "The micro ion drag pump using indium-tin-oxide (ITO) electrodes to resist aging", Sensors and Actuators A, Vol. 111, pp. 118-122, 2004.
4. J. Darabi, M. Rada, M. Ohadi, and J. Lawler, "Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump", J. Microelectro-Mechanical Systems, Vol. 11, pp. 684-690, 2002.
5. J.S. Chang, P.A. Lawless, and T. Yamamoto, "Corona discharge process", IEEE Trans. Plasma Sci., Vol. 19, pp. 1152-1166, 1991.
6. W.F. Pickard, "Ion drag pumping. 1. Theory", J. Appl. Phys., Vol. 34, pp. 246-250, 1963.
7. R.H. Fowler, "The restored electron theory of metals and thermionic formulae", Royal Soc. Proc., Vol. 117 (A778), pp. 549-552, 1928.
8. J. Darabi and H. Wang, "Development of an electrohydrodynamic injection micropump and its potential application in pumping fluids in cryogenic cooling systems", J. Microelectro-Mechanical Systems, Vol. 14, pp. 747-755, 2005.