Development of an electrohydrodynamic injection micropump and its potential application in pumping fluids in cryogenic cooling systems

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 747-755

  Darabi, Jeff ^a   Wang, Haixia ^b  

^a University of South Carolina   (United States)

^b INTEL CORPORATION   (China)

Author keywords

Electrohydrodynamic (EHD); Field emission; HFE 7100; Injection; Liquid nitrogen; Micropump

Indexed keywords

COOLING SYSTEMS; CRYOGENICS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; PUMPS;

CRYOGENIC COOLING; LIQUID NITROGEN; MICROPUMP;

ELECTROHYDRODYNAMICS;

EID: 27144470792     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845413     Document Type: Article

References (20)

1. J. Darabi, M. Rada, M. M. Ohadi, and J. Lawler, "Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump," J. Microelectromech. Syst., vol. 11, no. 6, pp. 684-690, 2002.
2. J. Darabi and H. Wang, "Development of an electrohydrodynamic injection micropump for cryogenic cooling," in Proc. IMECE2003 ASME Int. Mechan. Eng. Congress Expo., IMECE2003, Wash., D.C., 2003.
3. S. F. Bart, L. S. Tavrow, M. Mehregany, and J. H. Lang, "Microfabricated electrohydrodynamic pumps," Sens. Actuators A, vol. 21, no. 1, pp. 193-197, 1990.
4. A. Richter and H. Sandmaier, "An electrohydrodynamic pump," IEEE Micro Electro Mechanical Syst.: An Investigation of Micro Structures, Sensors, Actuators, Machines, and Robots, pp. 99-104, Feb. 11-14, 1990.
5. G. Fuhr, R. Hagedorn, T. Muller, and W. Benecke, "Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity," J. Microelectromech. Syst., vol. 1, no. 3, pp. 141-146, 1992.
6. S. H. Ahn and Y. K. Kim, "Fabrication and experiment of planar micro ion-drag pump," Sens. Actuators A, vol. 70, pp. 1-5, 1998.
7. H. T. Wang and J. D. Cross, "The interpretation of electrohydrodynamic mobility under unipolar injection in dielectric liquids," in Proc. 3rd Int. Conf. Properties and Application of Dielectric Materials, 1991, pp. 264-276.
8. B. Halpern and R. Gomer, "Field emission in liquids," J. of Chem. Phys., vol. 51, pp. 1031-1047, 1969.
9. B. Halpern and R. Gomer, "Field ionization in liquids," J. Chem. Phys., vol. 51, pp. 1048-1057, 1969.
10. R. H. Fowler and L. W. Nordheim, "Electron emission in intense electric field," in Proc. R. Soc. Lond. A, vol. 119, 1928, pp. 173-81.
11. L. W. Nordheim, "The effect of the image force on the emission and reflection of electrons by metals," in Proc. R. Soc. Lond. A, vol. 121, 1982, pp. 626-39.
12. A. Modinos, "Theoretical analysis of field emission data," Solid State Electronics, vol. 45, pp. 809-816, 2001.
13. G. Norman, A. Floriano, W. Toshinori, S. Huang, and G. R. Freeman, "Ion and electron mobilities in cryogenic liquids: Argon, nitrogen, methane, and ethane," J. Appl. Phys., vol. 57, pp. 1097-1102, 1984.
14. W. Schmidt, Liquid State Electronics of Insulating Liquid. Boca Raton, FL: CRC, 1997.
15. N. Gee, M. A. Floroano, T. Wada, S. S. Huang, and G. R. Freeman, "Ion and electron mobilties in cryogenic liquids," J. Appl. Phys., vol. 57, p. 1097, 1985.
16. Y. Sakai, W. H. Schimith, and A. G. Khrapak, "High- and low-mobility electrons in liquid neon," Chem. Phys., vol. 164, pp. 139-145, 1992.
17. K. F. Volukhin, A. G. Khrapak, and W. F. Schmidt, "Structure and mobility of negative ions in dense gases and nonpolar liquids," JETP, vol. 81, p. 901, 1995.
18. K. Yashino, U. Sowada, and W. F. Schmidt, "Effect of molecular solutes on the electron drift velocity in liquid Ar, Kr, and Xe," Physics Review, vol. A14, p. 438, 1976.
19. M. S. Naidu and V. Kamaraju, High Voltage Engineering, 2nd ed. New York: McGraw-Hill, 1995.
20. R. J. Moffat, "Describing the uncertainties in experimental results," in ASME J. Fluid Eng., vol. 107, 1988, pp. 250-260.