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Volumn 1097, Issue , 2009, Pages 12-21
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2D model of a tandem plasma source: the role of the transport processes
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Author keywords
2d discharge modeling; Hydrogen discharges; Tandem two chamber plasma sources
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Indexed keywords
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EID: 65349173553
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.3112506 Document Type: Conference Paper |
Times cited : (17)
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References (12)
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