Spatial distribution of the plasma characteristics of a tandem plasma source

AIP Conference Proceedings

Volumn 1097, Issue , 2009, Pages 99-108

  Paunska, Tsvetelina V ^a   Shivarova, Antonia P ^a   Tarnev, Khristo Ts ^b   Tsankov, Tsanko V ^a  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b TECHNICAL UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

2d discharge modeling; Hydrogen discharges; Tandem two chamber plasma sources

Indexed keywords

EID: 65349118771     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3112554     Document Type: Conference Paper

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