High refractive index nanocomposite fluids for immersion lithography

Langmuir

Volumn 25, Issue 4, 2009, Pages 2390-2401

  Bremer, L ^a   Tuinier, R ^a   Jahromi, S ^b  

^a DSM RESEARCH   (Netherlands)

^b DSM RESOLVE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BLUE SHIFTS; COMPOSITE FLUIDS; CONTINUOUS PHASE; DE-MIXING; DISPERSE PHASE; DISPERSION MEDIUMS; FLUID DEMIXING; HARD SPHERES; HIGH REFRACTIVE INDEX FLUIDS; HIGH REFRACTIVE INDICES; HIGH-SOLIDS; HIGHER INDICES; IMAGING EXPERIMENTS; IMMERSION FLUIDS; IMMERSION LITHOGRAPHIES; LIQUID STATE; MINIMUM THICKNESS; NANO-PARTICLE DISPERSIONS; SILICA NANOPARTICLES; STABLE SUSPENSIONS; STATISTICAL THERMODYNAMICS; STERIC STABILIZERS; UV ABSORPTIONS; VAN DER WAALS ATTRACTIONS;

COAGULATION; DISPERSION (WAVES); FLUIDS; GELATION; LIGHT REFRACTION; NANOPARTICLES; PERCOLATION (FLUIDS); PHOTOLITHOGRAPHY; QUANTUM THEORY; REFRACTIVE INDEX; REFRACTOMETERS; SILICA; SOLVENTS; STATISTICAL MECHANICS; THERMODYNAMICS; VAN DER WAALS FORCES;

SUSPENSIONS (FLUIDS);

EID: 65249120158     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la8026896     Document Type: Article

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