Characterization of magnetostrictive TMR pressure sensors by MOKE

Journal of Magnetism and Magnetic Materials

Volumn 316, Issue 2 SPEC. ISS., 2007, Pages

  Lohndorf M ^a   Dokupil, S ^a   Bootsmann, M T ^b   Malave A ^a   Ruhrig M ^c   Bar L ^c   Quandt, E ^a  

^a CENTER OF ADVANCED EUROPEAN STUDIES AND RESEARCH CAESAR   (Germany)

^b QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

^c SIEMENS AG   (Germany)

Author keywords

Magnetostriction; MEMS; MOKE; Pressure sensor; TMR

Indexed keywords

CHARACTERIZATION; MAGNETIC FILMS; MAGNETIZATION; MAGNETOSTRICTION; MEMS; OPTICAL KERR EFFECT; STRAIN MEASUREMENT; TENSILE STRAIN; THIN FILMS;

MAGNETIC THIN FILM TECHNOLOGY; MAGNETO-OPTICAL KERR EFFECT (MOKE) MEASUREMENTS; TENSILE MECHANICAL STRAIN;

PRESSURE SENSORS;

EID: 34250377517     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2007.02.095     Document Type: Article

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