Building cavities in microspheres and nanospheres

Nanotechnology

Volumn 20, Issue 6, 2009, Pages

  Ren, Zhiyu ^a,b   Zhang, Xuemin ^a   Zhang, Junhu ^a   Li, Xiao ^a   Yang, Bai ^a  

^a JILIN UNIVERSITY   (China)

^b HEILONGJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

REACTIVE IONS; SILICA SPHERES; SILICA STRUCTURES; SIMPLE METHODS;

SILICA; THICKNESS MEASUREMENT;

REACTIVE ION ETCHING;

MICROSPHERE; NANOSPHERE; POLYMER; SILICON DIOXIDE;

ARTICLE; CRYSTAL STRUCTURE; IMAGE ANALYSIS; IMAGE QUALITY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 65249097737     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/6/065305     Document Type: Article

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