|
Volumn 108, Issue 48, 2004, Pages 18575-18579
|
Fabrication of a two-dimensional periodic non-close-packed array of polystyrene particles
|
Author keywords
[No Author keywords available]
|
Indexed keywords
NON-CLOSE-PACKED ARRAYS;
POLYSTYRENE SPHERES;
REACTIVE ION ETCHING (RIE);
SILICON SUBSTRATES;
ELECTROSTATICS;
ETCHING;
IONS;
SCANNING ELECTRON MICROSCOPY;
SILICON;
SPIN COATING;
SUBSTRATES;
POLYSTYRENES;
|
EID: 10444266078
PISSN: 15206106
EISSN: None
Source Type: Journal
DOI: 10.1021/jp0475741 Document Type: Article |
Times cited : (88)
|
References (22)
|