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Volumn 267, Issue 8-9, 2009, Pages 1680-1683

Microstructure of Ti thin films formed by energetic physical vapour deposition processes

Author keywords

Diffusion; PIII; PVD; SEM; Ti

Indexed keywords

BULK TRANSPORTS; COLUMNAR MICROSTRUCTURES; HIGH-ENERGY IONS; INTERFACE REACTIONS; ION-BEAM SPUTTERING; LOWER AVERAGES; OXIDE FORMATIONS; PARTICLE ENERGIES; PHYSICAL VAPOUR DEPOSITIONS; PIII; PRIMARY IONS; PVD; SEM; SUBSTRATE TEMPERATURES; THIN-FILM MICROSTRUCTURES; TI; TI THIN FILMS; TITANIUM THIN FILMS; VACUUM ARC DEPOSITIONS;

EID: 65249084070     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.01.102     Document Type: Article
Times cited : (3)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.