Monolithic ceramic technology for sensing devices

Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

Volumn , Issue , 2009, Pages 293-296

  Ramos, Francisco M ^a,b   López Gándara, Carlos ^a,b   Cirera, Albert ^b   Morante, Joan R ^b  

^a FAE Francisco Albero SA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC TECHNOLOGIES; GAS SENSORS; MONOLITHIC CERAMICS; MULTI LAYERS; NANO-METER SCALE; NANO-SCALE; SENSING DEVICES; SMOOTH SURFACES; SUBSTRATE TECHNOLOGIES; SUBSTRATE THICKNESS;

CERAMIC MATERIALS; ELECTRIC WIRE; ELECTRON DEVICES; SENSORS;

SUBSTRATES;

EID: 64949151587     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SCED.2009.4800489     Document Type: Conference Paper

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