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Volumn 2, Issue 4, 2009, Pages 0465031-0465033
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A traveling wave type of piezoelectric ultrasonic bidirectional linear microactuator
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Author keywords
[No Author keywords available]
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Indexed keywords
BI-DIRECTIONAL MOTIONS;
CYLINDRICAL STATORS;
FINITE ELEMENT METHOD SIMULATIONS;
MAXIMUM VELOCITIES;
PZT;
THIN FILM METALLIC GLASS;
TRAVELING WAVE TYPES;
LIQUID METALS;
MICROACTUATORS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC CERAMICS;
PIEZOELECTRIC TRANSDUCERS;
PIEZOELECTRICITY;
PIPE;
STATORS;
ULTRASONIC APPLICATIONS;
ULTRASONICS;
METALLIC GLASS;
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EID: 64749097227
PISSN: 18820778
EISSN: 18820786
Source Type: Journal
DOI: 10.1143/APEX.2.046503 Document Type: Article |
Times cited : (5)
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References (20)
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