Detection of radical species produced by catalytic decomposition of H2, O2 and their mixtures on heated Ir surfaces

Thin Solid Films

Volumn 517, Issue 12, 2009, Pages 3446-3448

  Umemoto, Hironobu ^a   Kusanagi, Hiroki ^a   Nishimura, Kazuaki ^b   Ushijima, Mitsuru ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

Atomic hydrogen; Atomic oxygen; Catalytic chemical vapor deposition; Hot wire chemical vapor deposition; Hydrogen; Iridium; OH radical; Oxygen

Indexed keywords

ATOMIC HYDROGEN; ATOMIC OXYGEN; CATALYTIC CHEMICAL VAPOR DEPOSITION; HOT-WIRE CHEMICAL VAPOR DEPOSITION; OH RADICAL;

ATOMIC SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; FILAMENTS (LAMP); FREE RADICALS; HYDROGEN; IRIDIUM; OXYGEN; REACTION KINETICS; VAPORS; WIRE;

ATOMS;

EID: 64649104219     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.020     Document Type: Article

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