High piezoelectric properties in LiNbO3 transferred layer by the Smart Cut™ technology for ultra wide band BAW filter applications

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2008, Pages

  Moulet, J S ^a,b   Pijolat, M ^b   Dechamp, J ^b   Mazen, F ^b   Tauzin, A ^b   Rieutord, F ^b   Reinhardt, A ^b   Defay E ^b   Deguet, C ^b   Ghyselen, B ^a   Clavelier, L ^b   Aid M ^b   Ballandras, S ^c   Mazure C ^a  

^a PARC TECHNOLOGIQUE DES FONTAINES   (France)

^b CEA LETI   (France)

^c FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; BAW FILTERS; BULK ACOUSTIC WAVES; CRYSTALLINE QUALITIES; EMBEDDED METALS; HIGH-OVERTONE BULK ACOUSTIC RESONATORS; LITHIUM NIOBATE; PIEZOELECTRIC PROPERTIES; SINGLE-CRYSTALLINE; SINGLE-CRYSTALLINE FILMS; SMART CUTS; STARTING MATERIALS; TRANSFERRED LAYERS; ULTRA WIDE BANDS; XRD;

ACOUSTIC RESONATORS; ACOUSTICS; CRYSTALLINE MATERIALS; ELECTRON DEVICES; NIOBIUM COMPOUNDS; SINGLE CRYSTALS; SMELTING; TELECOMMUNICATION SYSTEMS;

FREQUENCY RESPONSE;

EID: 64549086685     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2008.4796785     Document Type: Conference Paper

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