Efforts in developing design and simulation tools for MEMS: DS/MEMS & CA/MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 275-284

  Youn, Sung Kie ^a   Kwak, Byungman ^a   Kwon, Jang Hyuk ^a   Chang, Su Young ^a   Huh, Jaesung ^a   Kim, Eugene ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

MEMS; Multi Physics; Optimal design; Parametric CAD; Robust design

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTROMAGNETISM; FINITE ELEMENT METHOD; OPTIMIZATION; PERTURBATION TECHNIQUES; PRODUCT DESIGN; PROGRAMMING THEORY;

DESIGN-OPTIMIZATION SOFTWARES;

MICROELECTROMECHANICAL DEVICES;

EID: 6444244449     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.462821     Document Type: Conference Paper

References (8)

1. Hydrodynamic force on a plate near the plane wall. Part II: Plate in squeezing motion
2. Numerical approach for the frequency-shifting analysis of electrostatic micro-mechanical actuator
3. Laterally driven electrostatic repulsive-force microactuators using asymmetric field distribution
4. Towards micropropulsion systems on-a-chip
5. CAD tools in mechanical sensor design
6. Simulation methods for Micro-Electro-Mechanical Structures(MEMS) with application to a microweezer
7. Efficient design and optimization of MEMS by integrating commercial simulation tools
8. A tunable vibratory microgyroscope