Thin film Li electrolytes for all-solid-state micro-batteries

International Journal of Surface Science and Engineering

Volumn 3, Issue 1-2, 2009, Pages 23-43

  Xia, Hui ^a   Wang, Hai Long ^a   Xiao, Wei ^a   Lai, Man On ^a   Lu, Li ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

All solid state micro batteries; Electronic conductivity; Ionic conductivity; Li electrolyte; Lithium ion conductors; Lithium ion batteries; Thin film; Thin film batteries

Indexed keywords

CHEMICAL STABILITY; ELECTRIC CONDUCTIVITY; IONIC CONDUCTION IN SOLIDS; IONIC CONDUCTIVITY; IONS; LITHIUM-ION BATTERIES; MICROELECTRONICS; MINIATURE BATTERIES; SOLID ELECTROLYTES; THIN FILMS;

ELECTRODE MATERIAL; ELECTRONIC CONDUCTIVITY; GLASSY ELECTROLYTES; LITHIUM ION CONDUCTORS; LITHIUM MICRO-BATTERY; MICRO BATTERY; MICRO-ELECTRONIC DEVICES; THIN FILM BATTERY;

THIN FILM LITHIUM ION BATTERIES;

EID: 64249084193     PISSN: 1749785X     EISSN: 17497868     Source Type: Journal    
DOI: 10.1504/IJSURFSE.2009.024360     Document Type: Review

References (83)

1. Ahn, J.K. and Yoon, S.G. (2005) 'Characteristics of amorphous lithium lanthanum titanate electrolyte thin films grown by PLD for use in rechargeable lithium microbatteries', Electrochemical and Solid-State Letters, Vol. 8, No. 2, pp.A75-A78.
2. 2', Journal of Applied Physics, Vol. 98, pp.023516-1-023516-7.
3. 2/polycrystalline-silicon power cells planarized by chemical mechanical polishing', Journal of Vacuum Science and Technology B, Vol. 24, No. 2, pp.562-569.
4. Balkanski, M., Julien, C. and Emery, J.Y. (1989) 'Integrable lithium solid-state microbatteries', Journal of Power Sources, Vol. 26, pp.615-622.
5. 4 in N-2-He gas mixtures', Journal of Vacuum Science and Technology A, Vol. 14, pp.34-37.
6. Bates, J.B. Gruzalski, G.R., Dudney, N.J., Luck, C.F. and Yu, X.H. (1994) 'Rechargeable thin-film lithium batteries', Solid State Ionics Vols. 70-71, pp.619-628.
7. Bates, J.B., Dudney, N.J., Gruzalski, G.R., Zuhr, R.A., Choudhury, A. and Luck, C.F. (1992) 'Electrical properties of amorphous lithium electrolyte thin films', Solid State Ionics, Vols. 53-56, pp.647-654.
8. Bates, J.B., Dudney, N.J., Neudecker, B., Ueda, A. and Evans, C.D. (2000) 'Thin-film lithium and lithium-ion batteries', Solid State Ionics, Vol. 135, pp.33-45.
9. 3', Thin Solid Films, Vol. 214, pp.219-222.
10. Birke, P., Chu, W.F. and Weppner, W. (1996) 'Materials for lithium thin-film batteries for application in silicon technology', Solid State Ionics, Vol. 93, pp.1-15.
11. Birke, P., Salam, F., Doring, S. and Weppner, W. (1999) 'A first approach to a monolithic all solid state inorganic lithium battery', Solid State Ionics, Vol. 118, pp.149-157.
12. Boyle, T.J., Ingersoll, D., Cygan, R.T., Rodriguez, M.A., Rahimian, K. and Voight, J.A. (2002) All-ceramic Thin Film Battery, Sandia Report, Sandia National Laboratories, Albuquerque, New Mexico 87185 and Livermore, California 94550.
13. 3 films', Journal of Applied Physics, Vol. 76, pp.4327-4331.
14. 5 solid electrolyte for thin film batteries', Journal of Power Sources, Vol. 163, No. 1, pp.223-228.
15. 5 solid electrolyte by aerosol flame deposition for thin film batteries', Solid State Ionics, Vol. 178, pp.119-123.
16. Choi, C.H., Cho, W.I., Cho, B.W., Kim, H.S., Yoon, Y.S. and Tak, Y.S. (2002) 'Radio-frequency magnetron sputtering power effect on the ionic conductivities of Lipon films', Electrochemical and Solid-State Letters, Vol. 5, No. 1, pp.A14-A17.
17. 5 based fast ion conducting glasses', Solid State Ionics, Vols. 40-41, pp.680-683.
18. 5 glasses', Solid State Ionics, Vol. 44, pp.325-329.
19. Creus, R., Sarradin, J., Astier, R., Pradel, A. and Ribes, M. (1989) 'The use of ionic and mixed conductive glasses in microbatteries', Materials Science and Engineering B, Vol. 3, pp.109-112.
20. 3 NASICON-type solid electrolyte', Journal of Power Sources, Vol. 174, pp.1100-1103.
21. Duclot, M. and Souquet, J.L. (2001) 'Classy materials for lithium batteries: Electrochemical properties and devices performances', Journal of Power Sources, Vols. 97-98, pp.97-98.
22. Dudney, N.J. (2003) Properties of Vacuum Deposited Thin Films of Lithium Phosphorous Oxynitride (Lipon) with an Expanded Composition Range, CRADA Final Report, http://www.osti.gov/bridge
23. Dudney, N.J. (2005) 'Solid-state thin-film rechargeable batteries', Materials Science and Engineering B, Vol. 116, No. 3, pp.245-249.
24. 2', Journal of Power Sources, Vols. 119-121, pp.300-304.
25. 5', Solid State Ionics, Vol. 96, pp.195-200.
26. Furusawa, S.I., Tabuchi, H., Sugiyama, T., Tao, S. and Irvine, J.T.S. (2005) 'Ionic conductivity of amorphous lithium lanthanum titanate thin film', Solid State Ionics, Vol. 176, pp.553-558.
27. 3 solid solution with perovskite-related structure', Solid State Ionics, Vol. 116, pp.11-18.
28. Hamon, Y., Douard, A., Sabary, F., Marcel, C., Vinatier, P., Pecquenard, B. and Levasseur, L. (2006) 'Influence of sputtering conditions on ionic conductivity of LiPON thin films', Solid State Ionics, Vol. 177, pp.257-261.
29. 3 NASICON-type solid electrolyte', Journal of the Electrochemical Society, Vol. 152, No. 11, pp.A2138-A2142.
30. Iriyama, Y., Kako, T., Yada, C., Abe, T. and Ogumi, Z. (2005) 'Charge transfer reaction at the lithium phosphorus oxynitride glass electrolyte/ lithium cobalt oxide thin film interface', Solid State Ionics, Vol. 176, pp.2371-2376.
31. 3 thin-films', Journal of Non-crystalline Solids, Vol. 57, No. 3, pp.1163-1169.
32. 2 cathode and LiPON electrolyte in the thin film battery', Journal of Power Sources Vol. 159, pp.223-226.
33. Jones, S.D. and Akridge, J.R. (1995) 'Development and performance of a rechargeable thin-film solid-state microbattery', Journal of Power Sources, Vol. 54, pp.63-67.
34. Jones, S.D. and Akridge, R. (1994) 'Thin film rechargeable Li batteries', Solid State Ionics, Vol. 69, pp.357-368.
35. Joo, K.H., Sohn, H.J., Vinatier, V., Pecquenard, B. and Levasseur, A. (2004) 'Lithium ion conducting lithium sulfur oxynitride thin film', Electrochemical and Solid-State Letters, Vol. 7, No. 8, pp.A256-A258.
36. Joo, K.H., Vinatier, P., Pecquenard, B., Levasseur, A. and Sohn, H.J. (2003) 'Thin film lithium ion conducting LiBSO solid electrolyte', Solid State Ionics, Vol. 160, pp.51-59.
37. Julien, C., Khelfa, A., Benramdane, N., Guesdon, J.P., Dzwonkowski, P. and Samaras, I. (1994) 'Lithium insertion in indium selenide films: application to microbatteries', Materials Science and Engineering B Vol. 23, No. 2, pp.105-115.
38. Kanehori, K, Ito, Y., Kirino, F., Miyauchi, K. and Kudo, T. (1986) 'Titanium disulfide films fabricated by plasma CVD', Solid State Ionics, Vols. 18-19, pp.818-822.
39. 5 system', Journal of the Electrochemical Society, Vol. 148, No. 7, pp.A742-A746.
40. Kanno, R., Hata, T., Kawamoto, Y. and Irie, M. (2000) 'Synthesis of a new lithium ionic conductor, thio-LISICION-lithium germanium sulfide system', Solid State Ionics, Vol. 130, pp.97-104.
41. Kawamura, J., Kuwata, N., Toribami, K., Sata, N., Kamishima, O. and Hattori, T. (2004) 'Preparation of amorphous thin films by pulsed laser deposition', Solid State Ionics, Vol. 175, pp.273-276.
42. Kbala, M., Makyta, M., Levasseur, A. and Hagenmuller, P. (1984) 'Characterization and electrical behavior of new lithium chalcoborate thin films', Solid State Ionics, Vol. 15, pp.163-169.
43. Kim, B.S., Cho, Y.S., Lee, J.G., Joo, K.H., Jung, K.O., Oh, J.M., Sohn, H.J., Kang, T., Cho, J., Park, Y.S. and Oh, J.Y. (2002) 'Ion-implantation modification of lithium-phosphorous oxynitride thin-films', Journal of Power Sources, Vol. 109, pp.214-219.
44. Kim, Y.G. and Wadley, H.N.G. (2008) 'Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach', Journal of Vacuum Science and Technology A, Vol. 26, No. 1, pp.174-183.
45. 3 perovskite thin films by the sol-gel method', Journal of Materials Science, Vol. 32, No. 8, pp.2063-2070.
46. Kuwata, N., Kumar, R., Toribami, K., Suzuki, T., Hattori, T. and Kawamura, J. (2006) 'Thin film lithium ion batteries prepared only pulsed laser deposition', Solid State Ionics, Vol. 177, pp.2827-2832.
47. Lee, J.M., Kim, S.H., Tak, Y. and Yoon, Y.S. (2006) 'Study on the LLT solid electrolyte thin film with LIPON interlayer intervening between LLT and electrodes', Journal of Power Sources, Vol. 163, pp.173-179.
48. Lee, S.J., Bae, J.H., Lee, H.W., Baik, H.K. and Lee, S.M. (2003a) 'Electrical conductivity in Li-Si-P-O-N oxynitride thin-films', Journal of Power Sources, Vol. 123, pp.61-64.
49. Lee, S.J., Baik, H.K. and Lee, S.M. (2003b) 'An all-solid-state thin film battery using LISIPON electrolyte and Si-V negative electrode films', Electrochemistry Communications, Vol. 5, pp.32-35.
50. Levasseur, A., Kbala, M., Hagenmuller, P., Couturier, G. and Danto, Y. (1983) 'Elaboration and characterization of lithium conducting thin film glasses', Solid State Ionics, Vols. 9-10, pp.1439-1444.
51. Li, C.L., Zhang, B. and Fu, Z.W. (2006) 'Physical and electrochemical characterization of amorphous lithium lanthanum titanate solid electrolyte thin-film fabricated by e-beam evaporation', Thin Solid Films, Vol. 515, pp.1886-1892.
52. Liu, W.Y., Fu, Z.W., Li, C.L. and Qin, Q.Z. (2004) 'Lithium phosphorus oxynitride thin film fabricated by a nitrogen plasma-assisted deposition of E-beam reaction evaporation', Electrochemical and Solid-State Letters, Vol. 7, pp.J36-J40.
53. 3 NASICON series', Chemistry of Materials, Vol. 15, pp.1879-1885.
54. Maqueda, O., Sauvage, F., Laffont, L., Martinez-Sarrion, M.L., Mestres, L. and Baudrin, E. (2008) 'Structural, microstrutrual and transport properties study of lanthanum lithium titanium perovskite thin films grown by pulsed laser deposition', Thin Solid Films, Vol. 516, pp.1651-1655.
55. Meunier, G., Dormoy, R. and Levasseur, A. (1989) 'New positive-electrode materials for lithium thin-film secondary batteries', Materials Science and Engineering B, Vol. 3, pp.19-23.
56. Minami, T., Hayashi, A. and Tatsumisago, M. (2006) 'Recent progress of glass and glass-ceramics as solid electrolytes for lithium secondary batteries', Solid State Ionics, Vol. 177, pp.2715-2720.
57. Miyauchi, K., Matsumoto, K., Kanehori, K. and Kudo, T. (1983) 'New amorphous thin films of lithium ion conductive electrolyte', Solid State Ionics, Vols. 9-10, pp.1469-1472.
58. Neudecker, B.J., Dudney, N.J. and Bates, J.B. (2000) 'Lithium-free thin-film battery with in situ plated Li anode', Journal of the Electrochemical Society, Vol. 147, No. 2, pp.517-523.
59. Nguyen, L.Q., Chen, L. and Thruong, V.V. (1997) 'A novel lithium conductor prepared by unbalanced magnetron r.f. sputtering', Thin Solid Films, Vol. 293, pp.175-178.
60. Ohta, N., Takada, K., Osada, M., Zhang, L.Q., Sasaki, T. and Watanabe, M. (2005) 'Solid electrolyte, thio-LISICON, thin film prepared by pulsed laser deposition', Journal of Power Sources, Vol. 146, pp.707-710.
61. 3-x thin film batteries', Solid State Ionics, Vol. 144, pp.59-64.
62. 2 thin films', Japanese Journal of Applied Physics, Vol. 28, No. 11, pp.2264-2267.
63. 2 thin films', Solid State Ionics, Vol. 35, pp.201-206.
64. 3 (M = Al, Fe, and Cr)', Journal of Applied Physics, Vol. 100, pp.083707-1-083707-7.
65. Robertson, A.D., West, A.R. and Ritchie, A.G. (1997) 'Review of crystalline lithium-ion conductors suitable for high temperature battery applications', Solid State Ionics, Vol. 104, pp.1-11.
66. Schwenzel, J., Thangadurai, V. and Weppner, W. (2006) 'Development of high-voltage all-solid-state thin-film lithium ion batteries', Journal of Power Sources, Vol. 154, pp.232-238.
67. 4', Journal of Materials Chemistry, Vol. 13, pp.1400-1405.
68. Stallworth, P.E., Vereda, F., Greenbaum, S.G., Haas, T.E., Zerigian, P. and Goldner, R.B. (2005) 'Solid-state NMR studies of lithium phosphorous oxynitride films prepared by nitrogen ion beam-assisted deposition', Journal of the Electrochemical Society, Vol. 152, No. 3, pp.A516-A522.
69. Stramare, S., Thangadurai, V. and Weppner, W. (2003) 'Lithium lanthanum titanates: A review', Chemistry of Materials, Vol. 15, pp.3974-3990.
70. 12 and lithium battery cathodes', Journal of Power Sources, Vol. 142, pp.339-344.
71. Thangadurai, V. and Weppner, W. (2006) 'Recent progress in solid oxide and lithium ion conducting electrolytes research', Ionics, Vol. 12. pp.81-92.
72. Vereda, F., Goldner, R.B., Haas, T.E. and Zerigian, P. (2002) 'Rapidly grown IBAD LiPON films with high Li-ion conductivity and electrochemical stability', Electrochemical and Solid-State Letters, Vol. 5, No. 11, pp.A239-A241.
73. Wang, B., Bates, J.B., Hart, F.X., Sales, B.C., Zuhr, R.A. and Robertson, J.D. (1996) 'Characterization of thin-film rechargeable lithium batteries with lithium cobalt oxide cathodes', Journal of the Electrochemical Society, Vol. 143, No. 10, pp.3203-3213.
74. 3 (M = Cr, Fe, Co, Al, Ga, Ln, Y)', Journal of Power Sources, Vol. 68, pp.421-426.
75. West, W.C., Whitacre, J.F. and Ratnakumar, B.V. (2003) 'Radio frequency magnetron-sputtered LiCoPO4 cathodes for 4.8 V thin-film batteries', Journal of the Electrochemical Socity, Vol. 150, pp.A1660-A1666.
76. 4 solid solutions as an electrolyte for film batteries using sputtered cathode layers', Solid State Ionics, Vol. 175, pp.251-255.
77. 3 thin films by the solution deposition', Thin Solid Films, Vol. 425, pp.103-107.
78. 2O (x = 0.0-0.20) with good electrical and electrochemical properties', Journal of American Ceramic Society, Vol. 90, No. 9, pp.2802-2806.
79. 3 glasses and thin films', Solid State Ionics Vol. 158, pp.151-156.
80. 3 glass system by sputtering', Solid State Ionics, Vol. 89, pp.299-304.
81. Yu, X.H., Bates, J.B., Jellison, G.E. and Hart, F.X. (1997) 'A stable thin-film lithium electrolyte:lIlthium phosphorous oxygnitride', Journal of the Electrochemical Society, Vol. 144, No. 2, pp.524-532.
82. Zhao, S.L. and Qin, Q.Z. (2003) 'Li-V-S-O thin film electrolyte for all-solid-state Li-ion battery', Journal of Power Sources, Vol. 122, pp.174-180.
83. Zhao, S.L., Fu, Z.W. and Qin, Q.Z. (2002) 'A solid-state electrolyte lithium phosphorous oxynitride film prepared by pulsed laser deposition', Thin Solid Films, Vol. 415, pp.108-113.