An efficient adaptive single-mode pull-in extraction algorithm for computer aided design of electrostatic MEMS devices

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 464-467

  Elata, David ^a   Bochobza Degani, Ofir ^a   Nemirovsly, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Adaptive Single Mode; Electrostatic actuator; Numerical scheme; Pull In

Indexed keywords

APPROXIMATION THEORY; COMPUTER AIDED DESIGN; ELECTROSTATIC ACTUATORS; ITERATIVE METHODS; MATHEMATICAL MODELS; PARAMETER ESTIMATION;

ADAPTIVE SINGLE MODES; NUMERICAL SCHEMES; OPTIMAL APPROXIMATION MODES; SINGLE-MODE APPROXIMATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344261854     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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