Dynamic analysis of electrostatic MEMS by meshless methods

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 356-359

  Li, Gang ^a   Aluru, N R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Boundary cloud method; Coupled electro mechanical analysis; Finite cloud method; Lagrangian description; Meshless

Indexed keywords

BOUNDARY CLOUD METHODS; COUPLED ELECTRO-MECHANICAL ANALYSIS; FINITE CLOUD METHODS; LAGRANGIAN DESCRIPTION; MESHLESS METHODS;

APPROXIMATION THEORY; COMPUTATIONAL GEOMETRY; ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; INTERPOLATION; MICROSTRUCTURE; PRESSURE EFFECTS; TENSORS; VECTORS; VELOCITY;

MICROELECTROMECHANICAL DEVICES;

EID: 6344294372     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. N. R. Aluru and J. White, "An Efficient Numerical Technique for Electromechanical Simulation of Complicated Microelectromechanical Structures", Sensors and Actuators A, 58, 1-11, 1997.
2. N. Aluru and Gang Li, "Finite Cloud Method: A True Meshless Technique Based On A Fixed Reproducing Kernel Approximation", International Journal for Numerical Methods in Engineering, 50(10), 2373-2410, 2001.
3. Xiaozhong Jin, Gang Li and N. R. Aluru, "On the Equivalence Between Least-Squares and Kernel Approximation in Meshless Methods", Computer Modeling in Engineering and Sciences, 2(4), 447-462, 2001.
4. Gang Li and N. R. Aluru, "Boundary Cloud Method: A Combined Scattered Point/Boundary Integral Approach for Boundary-Only Analysis", Accepted for publication in Computer Methods in Applied Mechanics and Engineering, 2001.
5. Gang Li and N. R. Aluru, "A Lagrangian approach to compute electrostatic forces on deformable MEMS", Accepted for publication in Journal of MEMS, 2001.
6. D. S. Chandrasekharaiah and L. Debnath, Continuum Mechanics, Academic Press, 1994.
7. F. Shi, P. Ramesh and S. Mukherjee, "On the Application of 2D Potential Theory to Electrostatic Simulation", Communications in Numerical Methods in Engineering, 11, 691-701, 1995.